Cubic Semiconductor Manufacturing Process Monitoring Solution

In semiconductor manufacturing industry, to minimize yield losses, it is essential for semiconductor fabrication plants (semiconductor fabs) to adopt rigorous contamination control strategies in the cleanrooms. Normally, particulate matter is one of the major sources of micro-contamination in semiconductor manufacturing processes, which needs to be monitored continuously.

In order to help semiconductor fabrication plants (semiconductor fabs) continuously monitor particulate matter to maintain low levels of airborne particles in cleanrooms, Cubic has provided reliable optical particle counters based on Light Scattering technology, OPC-6303 Series and OPC-6510 Series, which realize accurate detection of particles of various sizes in a unit volume of air. With a built-in unique Laser particle counter sensor module, consistent RPM fan, and well-designed ultrasonic flow sensor, OPC-6510 series and OPC-6303 series can provide a stable and high flow rate of 28.3L/min gas sampling rate which enables it compliant to ISO 21501-4 requirement. Cubic online optical particle counter can simultaneously output the particle number of 5 channels of 0.3μm, 0.5μm, 1.0μm, 5.0μm, 10μm in pcs/28.3L or pcs/m³and supports 24/7 operation to ensure stable and continuous particle monitoring. Moreover, Cubic online optical particle counter series could achieve online transmission of monitoring data based on RS485 ModBus and MQTT communication, which can be further integrated into the filtration system to maintain the particle matter pollution in the cleanroom environment within a certain low concentration range.

Furthermore, to realize in time safety warning during the semiconductor industry manufacturing processes, Cubic also designed TDLAS technology-based trace moisture sensor and oxygen sensor, to measure the trace content in ultra-high purity gases with high selectivity, high accuracy and excellent reliability.