Cubic Flat Panel Display Manufacturing Process Monitoring Solution

Flat panel display (FPD) manufacturing involves the production of various types of displays such as liquid crystal displays (LCDs), organic light-emitting diode (OLED) displays, and others, which requires manufacturing process with precision and cleanliness to ensure high-quality products.

Cleanrooms for FPD manufacturing should be designed to minimize the level of particles and also to control the filtered air supply by monitoring temperature, humidity, and pressure levels.

To achieve environmental process monitoring, Cubic has designed 2.83LPM Particle Counter OPC-6303 Series and 28.3LPM Particle Counter OPC-6510 Series, based on its core light scattering technology to monitor the particle levels, and also employed integrated CO2 sensor and controller AM6108B to monitor temperature and humidity in FPD manufacturing cleanrooms.